Fig. 7: Analysis of the frequency and amplitude resolution in linear and nonlinear operation regimes. | Microsystems & Nanoengineering

Fig. 7: Analysis of the frequency and amplitude resolution in linear and nonlinear operation regimes.

From: Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators

Fig. 7

With a drive AC voltage of 1 mV, amplitude noise density (a), amplitude Allan deviation (b) and frequency Allan deviation (c) with different direct currents. Amplitude noise density (d) at the drive voltage of 300 mV and amplitude Allan deviation (e) as well as frequency Allan deviation (f) at the corresponding bias situations

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