Table 7 Response and recovery times of the proposed multi-dof baw devices at different ethanol vapor concentrations

1-DoF

df/f₀

N/A

6 and 43

6.6 and 34.2

43.8 and 63.6

51.6 and 87.6

52.8 and 109

72 and 115

114 and 150

2-DoF_1

df/f₀

N/A

6.6 and 28

7.2 and 34.8

33.6 and 60.6

46.2 and 66.6

54 and 102

63 and 113

84 and 134

dAR

3&N/A

5.4 and 12.6

5.4 and 13.8

37.8 and 19.8

55.2 and 36

50.4 and 42

48 and 76.8

27.6 and 108

3-DoF Mode 1

df/f₀

N/A

22.8 and 52.8

13.8 and 67.2

19.8 and 58.2

27.6 and 72

66.6 and 95.4

68.4 and 126

72 and 138

dAR

N/A

1.2 and18

4.2 and 8.4

4.8 and 4.8

4.2 and 16.2

16.8 and 13.8

5.4 and 39.6

6 and 73.8

3-DoF Mode 2

df/f₀

N/A

4.8 and 7.2

0.6 and 65.4

7.8 and 58.2

15.6 and 61.8

12 and 65.4

15 and 60.6

22.8 and 58.2

dAR

N/A

4.8 and 1.2

8.4 and 12

0.12 and 18

3.6 and 16.2

1.2 and 28.2

1.8 and 46.2

1.8 and 11.4

0.1%

0.5%

1%

2%

5%

8%

15%

2-DoF_2

df/f₀

N/A

N/A

27.6 and 34.8

30 and 25.8

28.2 and 34.8

39.6 and 27.6

66 and 79.2

dAR

0.40 and 0.5

18.6 and 36.6

24 and 23.4

28.2 and 49.2

28.8 and 34.2

30.6 and 43.2

48.6 and 55.8