Fig. 1: Schematic of perforated MEMS structures.
From: Investigation of viscous damping in perforated MEMS devices
a Schematic of the perforated plate and the oscillating plate. b Cross-section of the perforated plate and the oscillating plate. c Perforated plate and cells. d Schematic of a single perforated cell. e Cell with a cylindrical hole. f Cell with a conical hole
