Table 1 Main simulation parameters
From: Investigation of viscous damping in perforated MEMS devices
Parameter name | Values |
|---|---|
Varying hole geometries | |
Width of rectangular plate, W (mm) | 1 |
Length of rectangular plate, L (mm) | 1 |
Oscillation frequency of plate, ω (rad/s) | 2π × 100 |
Viscosity coefficient of air, μ (N × s)/m2 | 1.7984 × 10−6 |
Ambient pressure, P (Pa) | 1.01 × 105 |
Thickness of air film h (μm) | 25, 100 |
Height of hole H (μm) | 50 |
Side length of cell lc (μm) | 0.11 |
Perforation ratio β | 0.1-0.8 |
Number of holes Nh | 81 |
Varying hole number | |
Width of rectangular plate, W (mm) | 2 |
Length of rectangular plate, L (mm) | 2 |
Thickness of air film h (μm) | 100 |
Height of hole H (μm) | 50 |
Perforation ratio β | 0.6 |
Number of holes Nh | 25-625 |
