Table 2 Structural parameters of perforated oscillators
From: Investigation of viscous damping in perforated MEMS devices
Parameter name | Values | |||
|---|---|---|---|---|
Cylindrical hole | Trapezoidal hole | |||
Side length of plates lp (mm) | 2 | 2 | 4.8 | 4.8 |
Thickness of plates tp (μm) | 310 | 310 | 310 | 310 |
Length of beams lb (mm) | 1 | 1 | 0.8 | 0.8 |
Width of beams wb (mm) | 0.1 | 0.1 | 0.1 | 0.1 |
Thickness of beams tb (mm) | 0.01 | 0.01 | 0.01 | 0.01 |
Thickness of air film h (μm) | 100 | 100 | 100 | 100 |
Radius of cylindrical holes rh (μm) | 110 | 160 | - | - |
Short side length of trapezoidal holes lh1 (μm) | - | - | 202 | 575 |
Long side length of trapezoidal holes lh2 (μm) | - | - | 627 | 1000 |
Side length of cell lc (μm) | 286 | 400 | 770 | 1250 |
Number of holes Nh | 49 | 25 | 25 | 9 |
