Fig. 13: Comparison among analytical results, simulation results, and previous work29 of strain energy per unit area when the wafer is fully bonded under different distributions.
(a) Cluster (b) Complex (c) Face (d) Line
Fig. 13: Comparison among analytical results, simulation results, and previous work29 of strain energy per unit area when the wafer is fully bonded under different distributions. | Microsystems & Nanoengineering
