Fig. 1
Experimental setup and basic characteristics of the resonator. a The left subfigure is the schematic of the MEMS resonator and the open-loop measuring circuits. The right subfigure is the schematic of the cross-section of the resonant structure, wherein the resonator processed on the silicon layer is anchored to the glass substrate through three anchor positions shown in the area within the red dotted boxes. b The linear amplitude response (blue solid line) and phase response (red solid line) of the device at an AC driving voltage of 50 mV. c Ring-down measurement. The blue dot is the experimental data, and the red solid line is the fitting result. Please see the “Materials and methods” section for more details. d Measured temperature coefficient of frequency of the 2nd Lamé mode. The inset shows the mode shape of the 2nd Lamé mode
