Fig. 2: Finite element simulation of electroosmotic actuation unit.

a An illustration of an electroosmotic actuation unit. b Simulation structure diagram. c Relationship between electric field, via hole diameter, and PCB thickness. d Electroosmotic flow rate at the central point P of the via hole at different voltages. e Electroosmotic flow rate at central point P of via hole with different diameters (r). f Volumetric flow rate of electroosmotic actuation unit with different diameters