Fig. 2: Schematic of the novel wall shear stress sensor with a floating cover plate. | Microsystems & Nanoengineering

Fig. 2: Schematic of the novel wall shear stress sensor with a floating cover plate.

From: A MEMS wall shear stress sensor with floating cover plate for aerospace flow monitoring in harsh environments

Fig. 2

a Disassembled view. b Sectional view. c Top view of floating sensing structures. d Simplified mechanical model of the conventional structure. e Simplified mechanical model of the novel structure with a floating cover plate. f Finite element analysis of static characteristics of the proposed sensor

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