Fig. 4: Resolution and precision of the acoustic micrometer.
From: Super-resolution acoustic displacement metrology through topological pairs in orbital meta-atoms
a-c Based on the experiments (red balls), linear regions with fitting slopes of 9.68 × 10−3 μm−1 (violet solid line), 3.03 × 10−3 μm−1 (gold solid line), and 2.29 × 10−3 μm−1 (blue solid line), respectively for acoustic micrometers (q = 4) with d = 3 mm (a), 10 mm (b), and 16 mm (c). The error bars are the standard deviation of three measurements. d–f The statistical analysis with 100 times measurements by use of the sample with d = 3 mm, depicting the displacements at two distinct positions. (d), Highly resolvable displacement of 7.5 μm with a precision of 0.5 μm. (e), Critically resolvable displacement of 1.2 μm with a precision of 0.2 μm. (f), Indistinguishable displacement of 0.3 μm with a precision of 0.1 μm.
