Table 1 Experimentally reported Q-factors in free-space optics at visible wavelengths
From: Million-Q free space meta-optical resonator at near-visible wavelengths
Ref. | Q | λ (nm) | Design / Structure | Device size (μm2) |
---|---|---|---|---|
8,000 | 750 | GMR / SiO2 grating on SiN waveguide | 10,000 × 15,000 | |
391 | 860 | GMR / photoresist grating on HfO2 waveguide | \ | |
32,000 | 490 | GMR / SiN photonic crystal slab | 600 × 600 | |
10,000 | 583 | Symmetry-protected BIC / SiN photonic crystal slab | 7,000 × 7,000 | |
2750 | 825 | Symmetry-protected BIC / GaAs metasurface | 60 × 108 | |
2750 | 717 | Resonance-trapped BIC / TiO2 lattice on dielectric-covered mirror | 500 × 500 | |
This work | 1,100,000 | 779 | GMR / patterned PMMA resist on SiN waveguide | 900 × 900 |