Table 1 Experimentally reported Q-factors in free-space optics at visible wavelengths

From: Million-Q free space meta-optical resonator at near-visible wavelengths

Ref.

Q

λ (nm)

Design / Structure

Device size (μm2)

16

8,000

750

GMR / SiO2 grating on SiN waveguide

10,000 × 15,000

17

391

860

GMR / photoresist grating on HfO2 waveguide

\

18

32,000

490

GMR / SiN photonic crystal slab

600 × 600

19

10,000

583

Symmetry-protected BIC / SiN photonic crystal slab

7,000 × 7,000

20

2750

825

Symmetry-protected BIC / GaAs metasurface

60 × 108

21

2750

717

Resonance-trapped BIC / TiO2 lattice on dielectric-covered mirror

500 × 500

This work

1,100,000

779

GMR / patterned PMMA resist on SiN waveguide

900 × 900