Table 1 Definition, symbols, bounds, and global/local optimization results of structural parameters of the sensing unit
From: A μGal MOEMS gravimeter designed with free-form anti-springs
Parameter name | Symbols | Bounds | optimization results | ||||
|---|---|---|---|---|---|---|---|
Lower limit (μm) | Upper limit (μm) | ||||||
global | local | global | local | global (μm) | local (μm) | ||
P3,x | x31 | 875 | / | 4475 | / | 2252.01 | / |
P4,x | x41 | 4475 | / | 8075 | / | 4535.86 | / |
P5,x | x51 | 8075 | / | 11,675 | / | 11,008.61 | / |
P3,y | y31 | 6050 | / | 13,250 | / | 7563.01 | / |
P4,y | y41 | 6050 | / | 13,250 | / | 11,687 | / |
P5,y | y51 | 6050 | / | 13,250 | / | 6513.04 | / |
P6,y | y61 | 6050 | 6050 | 13,250 | 10,954 | 8797 | 9201 |
P7,y | y71 | 6050 | 10,954 | 13,250 | 13,250 | 13,111 | 12,506 |
Width | wi | 30 | 30 | 40 | 32.93 | 30.93 | 30.86 |
Compression | B1 | 0 | 578.15 | 800 | 778.15 | 678.15 | 651.35 |
