Fig. 1: Se-mediated dry transfer of wafer-scale 2D MoS2 film.
From: Se-mediated dry transfer of wafer-scale 2D semiconductors for advanced electronics
a Schematic diagram of the transfer process. PPC polycarbonate, RIE reactive ion etching. b Photographs of a 2-in. wafer-scale Se/MoS2 film on hydrosol tape (left) peeled from sapphire substrate (right). Photographs of the as-transferred 2-in. scale MoS2 film before (c) and (d) after the removal of PPC/Se layer. Optical (e) and AFM (f) image of a Se-mediated transfer MoS2 film on the target substrate. AFM: atomic force microscope, RMS: root-mean-square roughness Optical (g) and AFM (h) image of a PMMA-transferred 2-in. MoS2 film for comparison. PMMA: polymethyl methacrylate.
