Fig. 3: X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) spectra of VdW-β-Ga2O3 thin films. | Nature Communications

Fig. 3: X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) spectra of VdW-β-Ga2O3 thin films.

From: Van der Waals β-Ga2O3 thin films on polycrystalline diamond substrates

Fig. 3

a XRD spectra under different temperature conditions. b Amplified XRD rocking curve of the (\(\bar{2}01\)) VdW-β-Ga2O3 reflection (Inset: Trends of FWHM variations). c XRD spectra of VdW-β-Ga2O3 at various O2 flow rates. d XPS spectra of the O1s peak under different O2 flow rates. Source data are provided as a Source Data file.

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