Fig. 8: Performance of the surface kinetic model for RIE on test data. | npj Computational Materials

Fig. 8: Performance of the surface kinetic model for RIE on test data.

From: A neural master equation framework for multiscale modeling of molecular processes: application to atomic-scale plasma processes

Fig. 8

The lines denote predictions from the model, while the open circles denote test data from MD simulations. The solid blue line, the black dashed–dot line, and the red dashed line represent the mixed layer (I), the surface (II), and the bulk gas (III) occupation probability dynamics, respectively. a 1100 total impacts at 90 eV Ar+ energy. b 560 total impacts 51 eV Ar+ energy. c 864 total impacts 79 eV Ar+ energy, and d 952 total impacts 29 eV Ar+ energy.

Back to article page