Fig. 2: Optimization of parylene-C films for the planarization layer.

a Crystallinity measured by XRD. b Young’s modulus measured by the tensile test, comparing parylene-C films before and after thermal annealing. c Voltage (V)-luminance (L) graph of textile-based OLEDs before and after parylene-C film annealing for utilization as a planarization layer (inset: cell images of textile based-OLEDs). d Mechanical characteristics of the resilience and yield strain along the stress-strain curves of the parylene-C films measured in this study and in SU-8 films in a previous study16.