Fig. 1: Images of wrinkle morphology and increasing process.
a AFM image of pristine PDMS and PDMS/PEALD-Al2O3 film. b Optical microscope images of 0-500 cycles PEALD-Al2O3 film deposited on PDMS. c Schematic image of increasing wrinkle degree.
Fig. 1: Images of wrinkle morphology and increasing process. | npj Flexible Electronics
