Fig. 2: The process of polymerization and related tests for polymerization.

a Schematic image of the polymerization of methyl polymerization. b QMS detection in the ALD process. c XPS spectra of PEALD-Al₂O₃ deposited on PDMS (Al 2p). d XPS spectra of PDMS (C 1 s) e XPS spectra of PEALD-Al₂O₃ deposited on PDMS (C 1 s).