Fig. 3: Changes in Curling degree and contour curves tests.

a, b Images of the curling phenomenon of 300/500 cycles of PEALD-Al₂O₃ prepared at RT on Pi substrate. c, d Images of the curling phenomenon of 10/30 min. of ITO prepared at RT on Pi substrate. e, f AFM images of 300/500 cycles of PEALD-Al₂O₃ prepared at RT on Pi substrate. g, h AFM images of 10/30 min. of ITO prepared at RT on Pi substrate. i, j Images of the curling phenomenon of 300/500 cycles of PEALD-Al₂O₃ prepared at RT on Pi/PDMS substrate. k, l Images of the curling phenomenon of 10/30 min. of ITO prepared at RT on Pi/PDMS substrate. m, n AFM images of 300/500 cycles of PEALD-Al₂O₃ prepared at RT on Pi/PDMS substrate. o, p AFM images of 10/30 min. of ITO prepared at RT on Pi/PDMS substrate. q Contour curves of deposited 300/500 cycle Al₂O₃ film as well as wrinkled Al₂O₃ film and calculated stress magnitude. r Schematic image of wrinkled morphology formation and residual tensile stress release.