Fig. 2: Alignment offset in large-scale vdW integration.
From: Highly reproducible van der Waals integration of two-dimensional electronics on the wafer scale
a, Optical microscope image of a 1 cm2, chip-scale vdW-integrated device. The scale bar is 1 mm. b, High-resolution optical microscope images at different locations marked in a. c, High-resolution optical microscope image showing the x axis and y axis alignment offset. The inset shows the areas in the dashed box. d, Statistical distribution of the alignment offset. e, Displacement vector mapping. f, Schematic illustration of the alignment offset analysis. θ, slant angle.
