Fig. 3: Parallel-connected UVC micro-LED array.
From: High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography
a, Micrography of the whole screen at the top view after pad connection. b, Front-view EL micrography of UVC micro-LED array. The inset shows the appearance of the whole screen. c,d, Periodically selected pixel behaviour of a UVC micro-LED screen: I–V curves in the semi-log scale (c) and the EL emission intensity spectra (d). e, EQE and LOP versus injection current density, with I–V characteristics shown in the inset. f, Far-field luminance distribution.
