Table 1 UVC micro-LED performance in this work compared with representative references

From: High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography

Parameters

Result of this work

Result in ref. 13

Result in ref. 35

Result in ref. 36

Result in ref. 37

Result in ref. 38

Result in ref. 11

Peak wavelength (nm)

270

280

273

275

275

277

262

Minimum device size (µm)

3

25

8

5

20

20

24

Array resolution

320 × 140

16 × 16

N/A

N/A

N/A

N/A

N/A

VF at 10 A cm–2 (V)

5.4

N/A

6.5

N/A

6.4

6.6

N/A

Ideality factor

2.6

N/A

N/A

N/A

N/A

N/A

N/A

Viewing angle

50°

N/A

N/A

N/A

N/A

N/A

N/A

Peak EQE

5.7%

4.7%

N/A

2.1%a

1.2%

2.5%

N/A

LOP density at 100 A cm–2 (W cm–2)

25.9

4.8

4.7

4.1

4.6

N/A

2.4

  1. aA peak EQE of 1.1% was reported for the 100 μm device in ref. 37.
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