Extended Data Fig. 1: Fabrication process of the Gaussian microcavity. | Nature Physics

Extended Data Fig. 1: Fabrication process of the Gaussian microcavity.

From: Nanophotonic quantum skyrmions enabled by semiconductor cavity quantum electrodynamics

Extended Data Fig. 1

(a) Epitaxial growth of the bottom semiconductor DBR and QDs. (b) Fabrication of alignment markers. (c) QD positioning by the wide-field fluorescence imaging technique. (d) SiNx and SiO2 deposition by chemical vapor deposition (CVD). (e) Wafer with patterned exposed photoresist after aligned EBL. (f) Lensed-shape photoresist after heat reflow. (g) Lensed-shape SiO2 defect after dry etching. (h) Deterministically coupled QD-microcavity devices after the top dielectric DBR is evaporated.

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