Fig. 10
From: Experimental study of inductively coupled plasma etching of patterned single crystal diamonds

3-D morphology of single crystal diamond patterned etched surfaces at different chamber air pressures (a) 10 mTorr, (b) 15 mTorr, (c) 20 mTorr, (d) 25 mTorr, and (e) 30 mTorr.