Fig. 9
From: Experimental study of inductively coupled plasma etching of patterned single crystal diamonds

(a) Variation of etching rate and (b) single crystal diamond etching surface roughness with different chamber air pressures.
From: Experimental study of inductively coupled plasma etching of patterned single crystal diamonds
(a) Variation of etching rate and (b) single crystal diamond etching surface roughness with different chamber air pressures.