Table 3 Chemical bath constituents and coating conditions1.
Chemical bath constituents and conditions | Composition |
---|---|
Nichem 3010 A | 57mL/L |
Nichem 3010B | 126 mL/L |
Nanoscale Y2O3 grains | 0.25–0.75 g/L |
Temperature | 90 ± 2 °C |
pH | 4.2 ± 0.5 |
Deposition period | 2 h |
Stirring speed | 3 rpm |