Fig. 5

A T/FWHM, B S/FoM, and C Q/LoD of the defected SPC-GRD as \(\left[\text{Air}*{({PSi}_{1}*{PSi}_{2})}^{N}*\text{PNC }*{({PSi}_{2}*{PSi}_{1})}^{N}*\text{Substrate}\right]\) at \({d}_{1}=100 \, \text{nm}\), \({d}_{2}=170 \, \text{nm}\), \({P}_{1}=20 \%\), \({P}_{2}=80 \%\) ,and \({d}_{D}=100 \, \text{nm}\).