Fig. 6

A T/FWHM, B S/FoM, and C Q/LoD of the defected SPC-GRD as \(\left[\text{Air}*{({PSi}_{1}*{PSi}_{2})}^{N}*\text{PNC }*{({PSi}_{2}*{PSi}_{1})}^{N}*\text{Substrate}\right]\) versus the thickness of defect at \({d}_{1}=100\,{\text{nm}}\), \({d}_{2}=170\,{\text{nm}}\), \({P}_{1}=20 \%\), and \({P}_{2}=80 \%\). The FWHMs are calculated for the peak of 0 Gy.