Fig. 3: Steady-state power responsivity RP/α for square membranes resonators.

a Comparison between the analytical models for a distributed source (solid line) and a point-like source (dashed line), alongside FEM simulations (COMSOL Multiphysics) for an IR beam with a 600 μm diameter (black, purple and yellow rhombuses). b Experimental measurements (black, purple and yellow crosses) compared to the distributed source model (black solid line). The blue band indicates the model’s uncertainty due to variations in material parameters (Table 1).