Table 6 Demonstrations of OPAs on the III/V-on-SOI platform

From: Progress and prospects for LiDAR-oriented optical phased arrays based on photonic integrated circuits

Year & Publications

Scale

Aperture Size X(μm)×Y(μm)

Beam-width \(\Delta {\theta }_{X}{(}^{\circ })\times \Delta {\theta }_{Y}{(}^{\circ })\)

Main Beam Power (mW)

201229

8

200 × 44

0.6 × 1.8

0.0041

201530

32

200 × 144

0.6 × 1

NA

201927

32 *

10000 × 62

10000 × 124

0.02 × 1.75

0.02 × 0.78

NA

202232

32

NA

0.09 × 0.15

~10

  1. *A 240-channel device is fabricated but not characterized due to phase shifter failure. A yield of ~90% is reported.
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