Oscar Recalde-Benitez and colleagues report a FIB-based sample preparation process to limit current leakage during operando TEM experiments, thus improving the accuracy of device nanocharacterization under operating conditions. The methodology results in leakage currents that are small compared to device currents, which enables the analysis of operating stack devices inside the microscope.
- Oscar Recalde-Benitez
- Tianshu Jiang
- Leopoldo Molina-Luna
