Non-contact infrared thermometry with high precision and low power consumption is critical for semiconductor manufacturing. Jindong Bai, Wenhang Yang, and colleagues, present a 15-sensor thermopile array using multiparameter compensation, achieving 25 mK accuracy, >2 W power, and 15.9 mK sensor consistency, enabling reliable thermal monitoring in industrial applications.
- Jindong Bai
- Wenhang Yang
- Shijie Liu
