Extended Data Figure 3: A schematic of the fabrication process of fuel cells with free-standing SNO membranes as the electrolyte. | Nature

Extended Data Figure 3: A schematic of the fabrication process of fuel cells with free-standing SNO membranes as the electrolyte.

From: Strongly correlated perovskite fuel cells

Extended Data Figure 3: A schematic of the fabrication process of fuel cells with free-standing SNO membranes as the electrolyte.

a, Patterning a etch mask on the back side of the Si3N4/Si/Si3N4 chip with photoresist (PR). b, Removing exposed silicon nitride by reactive ion etching in CF4 and O2. c, Etching the Si from the back side with a KOH aqueous solution to make free-standing Si3N4 membrane. d, Depositing SNO thin films onto the Si3N4 membranes by radio-frequency magnetron sputtering and post-annealing the sample to form stoichiometric SNO. e, Fabricating the porous Pt cathodes on the front side of the chip. f, Removing the silicon nitride membrane from the back side of the chip to expose SNO, using reactive ion etching. g, h, Depositing anodes on the back side of the chip. Two types of fuel cell anodes were studied in this work: porous Pt as a model system (g) and a dense Pd anode (h). Pd is an industry-standard proton conducting membrane that is used in this study to selectively permeate protons from the fuel side to the cathode.

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