Fig. 5: Kirigami based on ion-beam irradiation.

a Schematic illustration of the fabrication scheme with an FIB. b–k SEM images of various 3D structures fabricated by tree-type folding/bending with an FIB³⁰. b Folded emitter tip⁷⁶. c Curved carbon nanotube⁹². d Nanohelix⁷⁹. e, h Microcubic structures^74,79. f Nanoscale script⁸². g Swiss roll⁸¹. i, j Staircase-like and composite U-shaped structures⁸⁰. k Twisting butterfly wings⁹⁴. l Camera images of paper kirigami and m SEM images of close-loop nano-kirigami of an expandable dome²⁸. n–q 3D structures fabricated by close-loop nano-kirigami^28,30. Scale bars of i, j, m–q: 1 µm. Images reprinted with permission from: b ref. ⁷⁶; c ref. ⁹², g ref. ⁸¹, h ref. ⁷⁴ from Wiley; d, e ref. ⁷⁹; f ref. ⁸² from IOP; i, j ref. ⁸⁰ from Springer Nature; k ref. ⁹⁴ from RSC