Fig. 1: Configuration of the MASR system.
From: Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices
a Schematic of the MASR system based on a conventional microscopy configuration. A white-light light-emitting diode (LED) was used as the light source, and aperture and field stops were used. The light illuminated the objective lens, microsphere, and sample sequentially. The reflected light from the sample was split between the image sensor to capture the image and the grating to analyze the spectrum data. b Imaging optics with the microsphere under the objective lens. c The microsphere attached to the micropipette was controlled by the micromanipulator. d Enlarged image of the microsphere attached to the micropipette.
