Fig. 10: Spectrum measurement result of the edges and corner areas of cell blocks.
From: Microsphere-assisted, nanospot, non-destructive metrology for semiconductor devices
a ×20 image of DRAM cell array. b Principal component analysis map of the reflectance obtained by MASR. The red dots (#1 to #5) refer to the center positions of the cell block, while the black dots (#6 to #10) refer to the edge area from the outside of the cell block. c Spectral reflectance for positions #1 to #5 and d #6 to #10 in b.
