Fig. 5: Large-area grayscale painting using IL-GPSE.
a Schematic of spatial modulation of filling ratio for 2D nanostructures using IL-GPSE. b The photograph of 25 squares of 700-nm-period 2D patterns on photoresist modulated by SE projection, showing a clear grayscale change from dark brown to light gold. c SEM images of the region labeled using white box in b. d Fraction area of photoresist calculated from SEM images of Fig. S15, showing a negative correlation between the photoresist filling ratio and the SE dose. e A photograph of the 3-inch grayscale painting of Along the River During the Qingming Festival in photoresist patterned by IL-GPSE. f A dynamic structural color due to the residual diffraction at tilting angles. Grayscale paintings patterned by IL-GPSE are further g etched into 300-nm-thick SiO2-coated Si wafer, or h deposited with 50-nm-thick Ag on glass. Scale bars, 2 µm (inset in c), 10 µm (c), and 1 cm (b, f–h)
