Fig. 4: Quantitative amplitude and phase imaging EUV of an integrated circuit.
From: Material-specific high-resolution table-top extreme ultraviolet microscopy
a Reconstructed complex transmission of a conventional solid-state disc lamella using the m-s reconstruction model. At the edges of the reconstruction, artifacts are visible, which are particularly evident in the region of interest in (b). c Reconstructed complex transmission using the combined m-s/OPR approach. This results in a reduction of artifacts, as highlighted by the white insets (b), d. Since ptychography reconstructions are invariant under a global phase shift and amplitude scaling, the reconstructed complex transmission must be referenced. The reconstructed amplitude is referenced to the surrounding vacuum region, which is indicated in (a), b by a white box labeled “R”. The scale bar in a corresponds to 5 µm and the scale bar in (b), d corresponds to 1 µm.
