Fig. 1: Characterization of 4H-SiC integrated photonic microresonators.

a False-colored scanning electron microscopy (SEM) image of a 4H-SiC microdisk resonator with a radius of 98 µm. The SiC is blue-colored. b Normalized power transmission spectrum of an over-coupled microresonator with the transverse-magnetic (TM) polarization. The fundamental TM mode family is identified and marked by triangular symbols. Other resonances belong to higher-order TM modes of the microresonator. c A resonance of the fundamental TM mode with a loaded linewidth of 62 MHz extracted from the Lorentzian fit (red line), corresponding to a loaded Q factor of 3.1 × 106. d Numerical simulations of group-velocity dispersions (GVD) of 800 nm thick SiC microdisks with different radii. e Optical spectrum of the initially parametric oscillation with different input power