Fig. 3: Optical characterization of the experimentally fabricated MLA.

a The morphology image of the MLA with aperture of 100 μm. b Three-dimensional morphology of single microlens in the array. c The surface roughness of the MLA tested by atomic force microscope. d Schematic illustration of the experimental setup to characterize the samples. e The focal spots experimentally recorded in the focal plane. f The experimentally recorded electric-field intensity distributions along the x- and y-direction at the focal plane. g The relationship between the liquid volume and the focal length, and NA