Fig. 1: Creation of sub-5 nm SADC.
From: Laser manufacturing of spatial resolution approaching quantum limit

a Schematic of the threshold tracking and lock-in technology. b Relationship between the damaging size on hBN versus pulse numbers. c Dependence of pulse number for producing optically visible defects on laser pulse energy Ep. d TEM image of the laser-induced damaged region. e Schematic of laser ablated atom appears randomly in a small range defined by the statistical fluctuation of the electron kinetic energy when the laser pulse energy is reduced towards the SADC