Fig. 1: Configuration of the MAHSI system. | Light: Science & Applications

Fig. 1: Configuration of the MAHSI system.

From: Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

Fig. 1

a A schematic diagram of the MAHSI system based on a conventional microscopy. A Laser-Driven Light Source (LDLS) is used as the broadband light source. The Flexible Wavelength Selector (FWS) enables selection of incident light wavelengths, and the aperture stop adjusts the beam’s incident angle to the microsphere-attached objective lens. Reflected light from the sample is split and directed into both the camera and spectrometer. b The hyperspectral imaging process, the camera sequentially captures images with monochromatic wavelengths to obtain spectral reflectance at each pixel by interpolating intensity from each image. c Photos of the entire facility and internal optics and stage modules of the MAHSI system

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