Fig. 2: Measurement of distance between the objective lens and the sample. | Light: Science & Applications

Fig. 2: Measurement of distance between the objective lens and the sample.

From: Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

Fig. 2

a Spectral intensities relative to the vertical position of the objective lens. b Interference nodes at a specific position, indicated by the spectrum difference between two adjacent positions of the microsphere-attached objective lens. c Linear fitting of the interference node data to determine the absolute distance between the microsphere and the sample

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