Fig. 3: Correction of the magnification caused by chromatic aberration and PCA map. | Light: Science & Applications

Fig. 3: Correction of the magnification caused by chromatic aberration and PCA map.

From: Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

Fig. 3

a The super-resolution image captured by the MAHSI system. The effective FOV is 5.6 μm × 5.6 μm size (red square). b Working distance, which is equal to focal position for each wavelength. c Pixel resolution for each wavelength. Averaged pixel resolution is 14.4 nm/pixel. Averaged magnification is 450X. d The result of magnification correction described by horizontal cut (red dot line). Aligned pixel data after normalization of magnification. e, f The PCA map and skew spectrum plot splits of line and space pattern. The red and blue colored regions are spectra of the top and bottom 10% of the principal component representing line and space pattern, respectively. The green colored area shows the remaining spectra representing line edge. The bold lines are average spectrum of the red and blue colored areas

Back to article page