Fig. 5: The SWD images of the DRAM device. | Light: Science & Applications

Fig. 5: The SWD images of the DRAM device.

From: Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

Fig. 5

a The microscope image with 20x of DRAM device. The cell and SWD area is shown. Images of the SWD area in DRAM imaged by x100 with 0.95 N.A. (b) and the MAHSI system (c) in ROI (red box). d The SEM image in same ROI. 66 nm CD indicated by yellow arrows. e The cross-sectional intensity profile of 66 nm CD indicated by red dot line in MAHSI image

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