Fig. 7: Imaging sequence of the MAHSI system. | Light: Science & Applications

Fig. 7: Imaging sequence of the MAHSI system.

From: Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

Fig. 7

For acquiring hyperspectral imaging set, the MSI autofocus and the hyperspectral imaging are performed consecutively. d is distance between the objective and the sample and δ is distance variation. dc is current distance between the objective and the sample. Images are obtained at positions d0 and d0 + δ, which is possible at any position where MSI is measured. The MSI autofocus including imaging and computation is performed within 0.1 s. And a total acquisition time of hyperspectral imaging that a total of 80 images are acquired within the 400 nm to 790 nm range at 10 nm steps is 19 s

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