Fig. 1: BIC-supporting plasmonic metasurface.

a Sketch showing THG process under near-IR pump of the plasmonic metasurface composed of ordered array of laser-printed gold nanobumps. b Representative top-view SEM image of the gold nanobump array produced at an array pitch of Λ = 1.5 µm and applied pulse energy of E = 2.7 nJ, as well as c cross-sectional FIB cut showing hollow structure of the nanobumps. Scale bars on (b) and (c) correspond to 1 and 0.2 µm, respectively. d Wide-range FTIR spectra of the plasmonic nanobump arrays showing near-to-mid IR tunability of the collective plasmonic mode spectral position by varying the array pitch Λ and the nanobump size, as illustrated in the insets