Fig. 5: Tunability of Nano-line Feature Sizes and Sub-80 nm Triple Nano-lines prepariton.

a FWHM of nano-lines made at a scanning speed of 150 μm s⁻¹ and different laser fluences. The scale bar is 500 nm. SEM images of polarization-independent nano-lines made at a scanning speed of 150 μm s⁻¹ and different laser fluences of b 0.12, c 0.14, and d 0.16 mJ cm⁻². e SEM and f AFM images, as well as g corresponding cross-sectional profile of sub-80 nm triple nano-lines created at the laser fluence of 0.16 mJ cm⁻² and scanning speed of 150 μm s⁻¹