Fig. 4: Characterization of the phase recovery accuracy and resolution.

a The phase WOTF calculated from the PCI model at a wavelength of 450 nm in the spatial frequency domain. b Comparison between the phase transfer function of the TIE (blue line) and the phase WOTF along the white dashed line in a (red line). The black arrow indicates the position where the difference between the two functions is approximately 0.01. c Comparison of the horizontal cutlines of the phase WOTF at wavelengths of 445 nm and 450 nm. d Reconstructed phase profile of the microlens array. The right inset compares the phase in the red box region recovered by the MTFM and the TIE. The bottom inset compares the radially averaged height of the microlens array derived from the phase with the height measured by AFM. Scale bar: 20 μm. e Reconstructed profiles of the phase resolution test chart using the MTFM and the TIE. Scale bars: 8 μm. f Surface profiles of elements in group 9, as well as the 10-1 and 10-2 line pairs along the horizontal and longitudinal directions