Fig. 1: Schematic of the rapid fabrication of arrayed graphene-based SEP-MSCs via SLM-FPL technology.

a Schematic optical path configuration of the SLM-FPL processing system (left) and the in-situ fabrication of arrayed devices (right). BE, PBS, WP, M, C and LS are the abbreviations for the beam expander, polarizing beam splitter, half-wave plate, mirror, cylindrical lens and light source, respectively. b Schematic of the real-time modulation of beam profile enabled by SLMr. c Illustration of micro/nanograting structure formation on the electrode surface of SEP-MSCs. The grating orientation is strictly aligned with the polarization direction of incident light